{"id":233320,"date":"2024-10-19T15:12:23","date_gmt":"2024-10-19T15:12:23","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-en-62047-102011\/"},"modified":"2024-10-25T09:41:46","modified_gmt":"2024-10-25T09:41:46","slug":"bs-en-62047-102011","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-en-62047-102011\/","title":{"rendered":"BS EN 62047-10:2011"},"content":{"rendered":"
This part of IEC 62047 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained.<\/p>\n
The test piece is a cylindrical pillar fabricated on a rigid (or highly stiff) substrate by micro-machining technologies, and its aspect ratio (ratio of pillar diameter to pillar height) should be more than 3. This standard is applicable to metallic, ceramic, and polymeric materials.<\/p>\n
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
---|---|---|---|---|---|---|---|
6<\/td>\n | English CONTENTS <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | FOREWORD <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | 1 Scope 2 Normative references 3 Symbols and designations Figure 1 \u2013 Shape of cylindrical pillar (See Table 1 for symbols) <\/td>\n<\/tr>\n | ||||||
10<\/td>\n | 4 Test piece 4.1 General 4.2 Shape of test piece 4.3 Measurement of dimensions Table 1 \u2013 Symbols and designations of test piece <\/td>\n<\/tr>\n | ||||||
11<\/td>\n | 5 Testing method and test apparatus 5.1 Test principle 5.2 Test machine Figure 2 \u2013 Schematic of micro-pillar compression test <\/td>\n<\/tr>\n | ||||||
12<\/td>\n | 5.3 Test procedure 5.4 Test environment 6 Test report <\/td>\n<\/tr>\n | ||||||
14<\/td>\n | Annex A (informative) Error estimation using finite element method Figure A.1 \u2013 Error estimation with the aspect ratio and friction coefficient in the elastic modulus measurement <\/td>\n<\/tr>\n | ||||||
15<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Semiconductor devices. Micro-electromechanical devices – Micro-pillar compression test for MEMS materials<\/b><\/p>\n |