ISO/TS 22933:2022
$26.65
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
| Published By | Publication Date | Number of Pages |
| ISO | 2022-04 | 22 |
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
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