BS IEC 63068-3:2020
$142.49
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices – Test method for defects using photoluminescence
| Published By | Publication Date | Number of Pages |
| BSI | 2020 | 28 |
IEC 63068-3:2020 provides definitions and guidance in use of photoluminescence for detecting as-grown defects in commercially available 4H-SiC (Silicon Carbide) epitaxial wafers. Additionally, this document exemplifies photoluminescence images and emission spectra to enable the detection and categorization of the defects in SiC homoepitaxial wafers.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 2 | undefined |
| 4 | English CONTENTS |
| 6 | FOREWORD |
| 8 | INTRODUCTION |
| 9 | 1 Scope 2 Normative references 3 Terms and definitions |
| 13 | 4 Photoluminescence method 4.1 General 4.2 Principle 4.3 Requirements 4.3.1 Measuring equipment |
| 14 | Figures Figure 1 – Schematic diagram of PL imaging system |
| 15 | 4.3.2 Wafer positioning and focusing 4.3.3 Image capturing 4.3.4 Image processing 4.3.5 Image analysis |
| 16 | 4.3.6 Image evaluation 4.3.7 Documentation 4.4 Parameter settings 4.4.1 General 4.4.2 Parameter setting process 4.5 Procedure 4.6 Evaluation 4.6.1 General 4.6.2 Mean width of planar and volume defects |
| 17 | 4.6.3 Evaluation process 4.7 Precision 4.8 Test report 4.8.1 Mandatory elements 4.8.2 Optional elements |
| 18 | Annex A (informative)Photoluminescence images of defects A.1 General A.2 BPD |
| 19 | A.3 Stacking fault Figure A.1 – BPD |
| 20 | A.4 Propagated stacking fault Figure A.2 – Stacking fault Figure A.3 – Propagated stacking fault |
| 21 | A.5 Stacking fault complex A.6 Polytype inclusion Figure A.4 – Stacking fault complex |
| 22 | Figure A.5 – Polytype inclusion |
| 23 | Annex B (informative)Photoluminescence spectra of defects B.1 General B.2 BPD B.3 Stacking fault Figure B.1 – PL spectrum from BPD |
| 24 | Figure B.2 – PL spectra from Frank-type stacking faults Figure B.3 – PL spectra from Shockley-type stacking faults |
| 25 | B.4 Propagated stacking fault B.5 Stacking fault complex Figure B.4 – PL spectra from various stacking faultsin the wavelength range longer than 650 nm |
| 26 | B.6 Polytype inclusion Figure B.5 – PL spectrum from stacking fault complex Figure B.6 – PL spectrum from polytype inclusion |
| 27 | Bibliography |
