BS EN ISO 25178-607:2019
$142.49
Geometrical product specifications (GPS). Surface texture: Areal – Nominal characteristics of non-contact (confocal microscopy) instruments
Published By | Publication Date | Number of Pages |
BSI | 2019 | 30 |
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
PDF Catalog
PDF Pages | PDF Title |
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2 | undefined |
4 | European foreword Endorsement notice |
6 | Foreword |
7 | Introduction |
8 | 1 Scope 2 Normative references 3 Terms and definitions |
12 | 4 Descriptions of the influence quantities |
14 | Annex A (informative) Classification of in-plane scanning techniques for confocal microscopes |
20 | Annex B (informative) Theory of operation of confocal microscopes |
24 | Annex C (informative) Thin and thick films with confocal microscopes |
26 | Annex D (informative) Relation to the GPS matrix model |
27 | Bibliography |