BS EN ISO 23216:2022:2023 Edition

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Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

Published By	Publication Date	Number of Pages
BSI	2023	16

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Categories: 25.220.99 - Other treatments and coatings, BSI

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PDF Pages

PDF Title

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European foreword
Endorsement notice

Foreword

Introduction

1 Scope
2 Normative references
3 Terms and definitions
4 Test specimen preparation

5 Apparatus
6 Procedure
6.1 Treatment of specimen before test
6.2 Preparation for test
6.3 Testing conditions for test

6.4 Optical model for analysis
6.5 Number of test repeats
7 Classification of test results
8 Test report

Annex A (normative) Classification method for amorphous carbon films by optical properties

Bibliography

Status	Definitive
Pages	16
Publication Date	2023-03-15
ISBN	978 0 539 21456 7
Standard Number	BS EN ISO 23216:2022
Title	Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
Identical National Standard Of	EN ISO 23216, ISO 23216:2021
Corrects	BS ISO 23216:2021
Descriptors	Properties, Testing, Carbon, Films (states of matter), Tests
Publisher	BSI
Committee	STI/33
ICS Codes	25.220.99 - Other treatments and coatings