ASTM-F775 1988
$40.63
F775-88 Test Method for Wafer and Slice Flatness by Interferometric (Withdrawn 1991)
| Published By | Publication Date | Number of Pages |
| ASTM | 1988 |
ASTM F775-88
Withdrawn Standard: Test Method for Wafer and Slice Flatness by Interferometric (Withdrawn 1991)
ASTM F775
Scope
Keywords
ICS Code
ICS Number Code 29.045 (Semiconducting materials)
DOI:
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