ASTM-F518:1991 Edition
$40.63
F518-77(1991)E01 Practice for Determining Effective Adhesion of Photoresist to Hard-Surface Photomask Banks and Semiconductor Wafers During Etching (Withdrawn 1996)
Published By | Publication Date | Number of Pages |
ASTM | 1991 | 5 |
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ASTM F518-77-E01-Reapproved1991
Withdrawn Standard: Practice for Determining Effective Adhesion of Photoresist to Hard-Surface Photomask Banks and Semiconductor Wafers During Etching (Withdrawn 1996)
ASTM F518
Scope
Keywords
ICS Code
ICS Number Code n/a
DOI:
Standard Title | F518-77(1991)E01 Practice for Determining Effective Adhesion of Photoresist to Hard-Surface Photomask Banks and Semiconductor Wafers During Etching (Withdrawn 1996) |
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Published Code | ASTM |
Publication Date | 1991 |
Pages Count | 5 |
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