ASTM-D5544 2023

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D5544-16(2023) Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water

Published By	Publication Date	Number of Pages
ASTM	2023	9

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Categories: 71.040.40 - Chemical analysis, ASTM

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Description

ASTM D5544-16-Reapproved2023

Active Standard: Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water

ASTM D5544

Scope

1.1 This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).

1.2 This test method uses a continuous, real time monitoring technique to measure the concentration of RAE. A pressurized sample of high-purity water is supplied to the test method’s apparatus continuously through ultra-clean fittings and tubing. Contaminants from the atmosphere are therefore prevented from entering the sample. General information on the test method and a literature review on the continuous measurement of RAE has been published.2

1.3 The values stated in SI units are to be regarded as standard. The values given in parentheses are mathematical conversions to inch-pound units that are provided for information only and are not considered standard.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.

1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Keywords

high-purity water; nonvolatile residue; residue after evaporation ;

ICS Code

ICS Number Code 71.040.40 (Chemical analysis)

DOI: 10.1520/D5544-16R23

Additional information

Standard Title	D5544-16(2023) Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
Published Code	ASTM
Publication Date	2023
Pages Count	9
ICS Codes	71.040.40 - Chemical analysis